Performance evaluation of MEMS piezoelectric inertial energy generator

Vibration based inertial energy generators have become significantly popular due to the growing demand of wireless sensor networks which need miniature, portable, long lasting and easily recharged sources of power. Usage of hazardous batteries is an unacceptable solution to power up the densely...

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Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Othman, Raihan, Salleh, Hanim
Format: Proceeding Paper
Language:English
Published: 2011
Subjects:
Online Access:http://irep.iium.edu.my/10047/1/10047.pdf
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author Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Othman, Raihan
Salleh, Hanim
author_facet Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Othman, Raihan
Salleh, Hanim
author_sort Md Ralib @ Md Raghib, Aliza 'Aini
collection IIUM
description Vibration based inertial energy generators have become significantly popular due to the growing demand of wireless sensor networks which need miniature, portable, long lasting and easily recharged sources of power. Usage of hazardous batteries is an unacceptable solution to power up the densely populated nodes due to their bulky sizes and high battery replacement cost. As such, the viability of ‘green’ microelectromechanical (MEMS) vibration based inertial energy generator has become even more dominant. This paper reports the design and simulation of a cantilever piezoelectric inertial energy generator based on bulk silicon micromachining for wireless condition monitoring in power plants. Power plants generate ambient vibrations in the low kHz range which can be harvested to power the wireless condition monitoring circuits. Output power of the system will be enhanced when it is operated at the ambient resonance frequency. This paper discusses the effect of various lengths, shapes and volume of the cantilever beam, to its natural resonant frequency. The effect of different piezoelectric material with the maximum output power produced is also highlighted. The design and finite element modeling was conducted using MEM PZE module in Coventorware. TM
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spelling oai:generic.eprints.org:100472016-03-17T02:39:39Z http://irep.iium.edu.my/10047/ Performance evaluation of MEMS piezoelectric inertial energy generator Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Othman, Raihan Salleh, Hanim TK7885 Computer engineering Vibration based inertial energy generators have become significantly popular due to the growing demand of wireless sensor networks which need miniature, portable, long lasting and easily recharged sources of power. Usage of hazardous batteries is an unacceptable solution to power up the densely populated nodes due to their bulky sizes and high battery replacement cost. As such, the viability of ‘green’ microelectromechanical (MEMS) vibration based inertial energy generator has become even more dominant. This paper reports the design and simulation of a cantilever piezoelectric inertial energy generator based on bulk silicon micromachining for wireless condition monitoring in power plants. Power plants generate ambient vibrations in the low kHz range which can be harvested to power the wireless condition monitoring circuits. Output power of the system will be enhanced when it is operated at the ambient resonance frequency. This paper discusses the effect of various lengths, shapes and volume of the cantilever beam, to its natural resonant frequency. The effect of different piezoelectric material with the maximum output power produced is also highlighted. The design and finite element modeling was conducted using MEM PZE module in Coventorware. TM 2011-05-11 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/10047/1/10047.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Othman, Raihan and Salleh, Hanim (2011) Performance evaluation of MEMS piezoelectric inertial energy generator. In: 2011 IEEE Symposium Design, Test and Packaging of MEMS and MOEMS (DTIP 2011), 11th-13th May 2011, Aix-en-Provence, France. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6107977
spellingShingle TK7885 Computer engineering
Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Othman, Raihan
Salleh, Hanim
Performance evaluation of MEMS piezoelectric inertial energy generator
title Performance evaluation of MEMS piezoelectric inertial energy generator
title_full Performance evaluation of MEMS piezoelectric inertial energy generator
title_fullStr Performance evaluation of MEMS piezoelectric inertial energy generator
title_full_unstemmed Performance evaluation of MEMS piezoelectric inertial energy generator
title_short Performance evaluation of MEMS piezoelectric inertial energy generator
title_sort performance evaluation of mems piezoelectric inertial energy generator
topic TK7885 Computer engineering
url http://irep.iium.edu.my/10047/1/10047.pdf
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