Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...
| Hlavní autoři: | , |
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| Médium: | Proceeding Paper |
| Jazyk: | English |
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Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM
2010
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| On-line přístup: | http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf |