Characterisation of surface texture using AFM with trimmed probe tip
This paper discusses the scanning performance of a trimmed atomic force microscope (AFM) tip. A standard tip was trimmed by focused ion beam (FIB) sputtering to achieve a higher aspect ratio and sharpness. Microfeatures produced by FIB sputtering on a single crystal silicon substrate were scanned...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Maney Publishing
2006
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27098/1/017_SE_22%286%29_2006_443-446.pdf |