Surface roughness of ion-sputtered micromold
This paper discusses the development of mathematical models for the calculation of surface roughness of focused ion beam (FIB) sputtered microfeatures. The effective beam shape was characterized first and then the beam function was developed. Material function was developed from the inherent mater...
| Main Authors: | , , , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27302/1/067_ICME_2001_Dhaka_207-212.pdf |
| _version_ | 1825646977788936192 |
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| author | Ali, Mohammad Yeakub Bryan, N. K. A. Hung, W. N. P. Alauddin, M. Yuan, S. |
| author_facet | Ali, Mohammad Yeakub Bryan, N. K. A. Hung, W. N. P. Alauddin, M. Yuan, S. |
| author_sort | Ali, Mohammad Yeakub |
| collection | IIUM |
| description | This paper discusses the development of mathematical models for the calculation of surface
roughness of focused ion beam (FIB) sputtered microfeatures. The effective beam shape was characterized
first and then the beam function was developed. Material function was developed from the inherent material
properties. These two functions were then combined mathematically to develop the surface roughness models.
The models were verified by sputtering single crystal silicon using 50 keV Ga ion FIB. The models were
applied to fabricate microcavities which were successfully used for the replication of three dimensional (3D)
polymer microcomponents. |
| first_indexed | 2024-03-05T23:10:44Z |
| format | Proceeding Paper |
| id | oai:generic.eprints.org:27302 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-13T19:03:05Z |
| publishDate | 2001 |
| record_format | dspace |
| spelling | oai:generic.eprints.org:273022013-09-03T06:55:43Z http://irep.iium.edu.my/27302/ Surface roughness of ion-sputtered micromold Ali, Mohammad Yeakub Bryan, N. K. A. Hung, W. N. P. Alauddin, M. Yuan, S. TJ Mechanical engineering and machinery TS Manufactures This paper discusses the development of mathematical models for the calculation of surface roughness of focused ion beam (FIB) sputtered microfeatures. The effective beam shape was characterized first and then the beam function was developed. Material function was developed from the inherent material properties. These two functions were then combined mathematically to develop the surface roughness models. The models were verified by sputtering single crystal silicon using 50 keV Ga ion FIB. The models were applied to fabricate microcavities which were successfully used for the replication of three dimensional (3D) polymer microcomponents. 2001 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/27302/1/067_ICME_2001_Dhaka_207-212.pdf Ali, Mohammad Yeakub and Bryan, N. K. A. and Hung, W. N. P. and Alauddin, M. and Yuan, S. (2001) Surface roughness of ion-sputtered micromold. In: International Conference on Mechanical Engineering (ICME) 2001, 26-28 December 2001, Dhaka, Bangladesh. |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Bryan, N. K. A. Hung, W. N. P. Alauddin, M. Yuan, S. Surface roughness of ion-sputtered micromold |
| title | Surface roughness of ion-sputtered micromold |
| title_full | Surface roughness of ion-sputtered micromold |
| title_fullStr | Surface roughness of ion-sputtered micromold |
| title_full_unstemmed | Surface roughness of ion-sputtered micromold |
| title_short | Surface roughness of ion-sputtered micromold |
| title_sort | surface roughness of ion sputtered micromold |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/27302/1/067_ICME_2001_Dhaka_207-212.pdf |
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