Geometrical integrity of microholes produced by micro-EDM
Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, et...
| Main Author: | |
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| Format: | Monograph |
| Language: | English |
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Research Management Center, IIUM
2008
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| Online Access: | http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf |
| _version_ | 1825647143496450048 |
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| author | Ali, Mohammad Yeakub |
| author_facet | Ali, Mohammad Yeakub |
| author_sort | Ali, Mohammad Yeakub |
| collection | IIUM |
| description | Although there are many techniques for the fabrication of micro-hole for Bio-MEMS
and microfludic applications, characterization of high aspect ratio (depth/diameter)
micro-hole is a critical issue among the researchers worldwide. The characteristics
such as surface finish, vertical side wall, etc. influence the fluid flow inside the
channels. This project (EDW-17) was followed by project of EDW-18, where EDM
micro drilling process was developed. In this research project the high aspect ratio
EDM drilled micro holes were measured and investigated. At first, an experimental
process was developed to open the internal geometry of the holes and then
characterized the geometrical integrity and surface texture using scanning electron
microscope (SEM) and atomic force microscope (AFM). |
| first_indexed | 2024-03-05T23:13:14Z |
| format | Monograph |
| id | oai:generic.eprints.org:28924 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-13T19:08:43Z |
| publishDate | 2008 |
| publisher | Research Management Center, IIUM |
| record_format | dspace |
| spelling | oai:generic.eprints.org:289242013-09-02T07:29:39Z http://irep.iium.edu.my/28924/ Geometrical integrity of microholes produced by micro-EDM Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, etc. influence the fluid flow inside the channels. This project (EDW-17) was followed by project of EDW-18, where EDM micro drilling process was developed. In this research project the high aspect ratio EDM drilled micro holes were measured and investigated. At first, an experimental process was developed to open the internal geometry of the holes and then characterized the geometrical integrity and surface texture using scanning electron microscope (SEM) and atomic force microscope (AFM). Research Management Center, IIUM 2008-01 Monograph NonPeerReviewed application/pdf en http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf Ali, Mohammad Yeakub (2008) Geometrical integrity of microholes produced by micro-EDM. Research Report. Research Management Center, IIUM, Kuala Lumpur. (Unpublished) EDW A06-17 |
| spellingShingle | TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Geometrical integrity of microholes produced by micro-EDM |
| title | Geometrical integrity of microholes produced by micro-EDM |
| title_full | Geometrical integrity of microholes produced by micro-EDM |
| title_fullStr | Geometrical integrity of microholes produced by micro-EDM |
| title_full_unstemmed | Geometrical integrity of microholes produced by micro-EDM |
| title_short | Geometrical integrity of microholes produced by micro-EDM |
| title_sort | geometrical integrity of microholes produced by micro edm |
| topic | TJ Mechanical engineering and machinery TS Manufactures |
| url | http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf |
| work_keys_str_mv | AT alimohammadyeakub geometricalintegrityofmicroholesproducedbymicroedm |