Design and optimization of a micro capacitive pressure sensor
The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf |
| Summary: | The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer. |
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