Artificial neural network based hysteresis compensation for piezoelectric tube scanner in atomic force microscopy
Piezoelectric tube scanner is a major component that used in nanoscale imaging tools such as atomic force microscopy (AFM). This is because it can provide precise nanoscale positioning. However the precision is limited by vibration and some nonlinear drawbacks represented by creep and hysteresis. H...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE Xplore
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/34971/2/06412244.pdf |