On-chip hotplate for temperature control of CMOS SAW resonators
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistor...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2008
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| Online Access: | http://irep.iium.edu.my/3717/1/20.pdf |
| _version_ | 1796875042788737024 |
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| author | Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. |
| author_facet | Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. |
| author_sort | Nordin, Anis Nurashikin |
| collection | IIUM |
| description | Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method of temperature control for CMOS SAW resonators. The design employs the oven control temperature stabilization scheme where the devicepsilas temperature is elevated to higher than Tmax to maintain constant device temperature. The efficiency of the polysilicon resistor as a heating element was verified through a 1-D partial differential equation model, 3-D CoventorWarereg finite element simulations and measurements using Compixreg thermal camera. To verify that the on-chip hotplate is effective as a temperature control method, both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/degC has been reduced to -23.19 ppm/degC when heated to 56degC. |
| first_indexed | 2024-03-05T22:33:06Z |
| format | Proceeding Paper |
| id | oai:generic.eprints.org:3717 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-05T22:33:06Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | oai:generic.eprints.org:37172011-10-27T04:24:10Z http://irep.iium.edu.my/3717/ On-chip hotplate for temperature control of CMOS SAW resonators Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. TK7885 Computer engineering Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method of temperature control for CMOS SAW resonators. The design employs the oven control temperature stabilization scheme where the devicepsilas temperature is elevated to higher than Tmax to maintain constant device temperature. The efficiency of the polysilicon resistor as a heating element was verified through a 1-D partial differential equation model, 3-D CoventorWarereg finite element simulations and measurements using Compixreg thermal camera. To verify that the on-chip hotplate is effective as a temperature control method, both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/degC has been reduced to -23.19 ppm/degC when heated to 56degC. 2008-04-09 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/3717/1/20.pdf Nordin, Anis Nurashikin and Voiculescu, Ioana and Zaghloul, Mona E. (2008) On-chip hotplate for temperature control of CMOS SAW resonators. In: Design, Test, Integration and Packaging of MEMS/MOEMS, 2008, April 9-11, 2008, Nice, French Riviera, France. http://documents.irevues.inist.fr/bitstream/handle/2042/16862/dtip08071.pdf?sequence=1 |
| spellingShingle | TK7885 Computer engineering Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. On-chip hotplate for temperature control of CMOS SAW resonators |
| title | On-chip hotplate for temperature control of CMOS SAW resonators |
| title_full | On-chip hotplate for temperature control of CMOS SAW resonators |
| title_fullStr | On-chip hotplate for temperature control of CMOS SAW resonators |
| title_full_unstemmed | On-chip hotplate for temperature control of CMOS SAW resonators |
| title_short | On-chip hotplate for temperature control of CMOS SAW resonators |
| title_sort | on chip hotplate for temperature control of cmos saw resonators |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/3717/1/20.pdf |
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