On-chip hotplate for temperature control of CMOS SAW resonators

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistor...

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Autori principali: Nordin, Anis Nurashikin, Voiculescu, Ioana, Zaghloul, Mona E.
Natura: Proceeding Paper
Lingua:English
Pubblicazione: 2008
Soggetti:
Accesso online:http://irep.iium.edu.my/3717/1/20.pdf