On-chip hotplate for temperature control of CMOS SAW resonators
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistor...
| Hauptverfasser: | , , |
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| Format: | Proceeding Paper |
| Sprache: | English |
| Veröffentlicht: |
2008
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| Schlagworte: | |
| Online Zugang: | http://irep.iium.edu.my/3717/1/20.pdf |