Novel MEMS fully differential capacitive transducer design and analysis
This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a...
| Asıl Yazarlar: | , , , , , |
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| Materyal Türü: | Proceeding Paper |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
2011
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| Konular: | |
| Online Erişim: | http://irep.iium.edu.my/3731/1/28.pdf |
| _version_ | 1825644459817172992 |
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| author | Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik |
| author_facet | Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik |
| author_sort | Ya, Ma Li |
| collection | IIUM |
| description | This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change. |
| first_indexed | 2024-03-05T22:33:07Z |
| format | Proceeding Paper |
| id | oai:generic.eprints.org:3731 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-05T22:33:07Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | oai:generic.eprints.org:37312017-08-18T03:16:31Z http://irep.iium.edu.my/3731/ Novel MEMS fully differential capacitive transducer design and analysis Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik TK7885 Computer engineering This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change. 2011-05 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/3731/1/28.pdf Ya, Ma Li and Khan, Sheroz and Nordin, Anis Nurashikin and Al-Khateeb, Khalid A. Saeed and Islam, Md. Rafiqul and Naji, Ahmed Wathik (2011) Novel MEMS fully differential capacitive transducer design and analysis. In: 2011 4th International Conference on Mechatronics: Integrated Engineering for Industrial and Societal Development (ICOM 2011), 17-19 May, 2011, Kuala Lumpur, Malaysia. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937152&tag=1 |
| spellingShingle | TK7885 Computer engineering Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik Novel MEMS fully differential capacitive transducer design and analysis |
| title | Novel MEMS fully differential capacitive transducer design and analysis |
| title_full | Novel MEMS fully differential capacitive transducer design and analysis |
| title_fullStr | Novel MEMS fully differential capacitive transducer design and analysis |
| title_full_unstemmed | Novel MEMS fully differential capacitive transducer design and analysis |
| title_short | Novel MEMS fully differential capacitive transducer design and analysis |
| title_sort | novel mems fully differential capacitive transducer design and analysis |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/3731/1/28.pdf |
| work_keys_str_mv | AT yamali novelmemsfullydifferentialcapacitivetransducerdesignandanalysis AT khansheroz novelmemsfullydifferentialcapacitivetransducerdesignandanalysis AT nordinanisnurashikin novelmemsfullydifferentialcapacitivetransducerdesignandanalysis AT alkhateebkhalidasaeed novelmemsfullydifferentialcapacitivetransducerdesignandanalysis AT islammdrafiqul novelmemsfullydifferentialcapacitivetransducerdesignandanalysis AT najiahmedwathik novelmemsfullydifferentialcapacitivetransducerdesignandanalysis |