Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching
In this paper, a simple microcantilever release process using anisotropic wet etching is presented. The microcantilever release is conducted at the final stage of the fabrication of piezoresistive microcantilever sensor. Issues related to microcantilever release such as microscopic roughness and mac...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Trans Tech Publications Ltd., Switzerland
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/38849/1/applied_mechanics_and_materials.pdf |
| _version_ | 1796879117729136640 |
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| author | Ab Rahim, Rosminazuin Bais, Badariah Yeop Majlis, Burhanuddin |
| author_facet | Ab Rahim, Rosminazuin Bais, Badariah Yeop Majlis, Burhanuddin |
| author_sort | Ab Rahim, Rosminazuin |
| collection | IIUM |
| description | In this paper, a simple microcantilever release process using anisotropic wet etching is presented. The microcantilever release is conducted at the final stage of the fabrication of piezoresistive microcantilever sensor. Issues related to microcantilever release such as microscopic roughness and macroscopic roughness has been resolved using simple technique. By utilizing silicon oxide (SiO2) as the etch stop for the wet etching process, issues related to microscopic roughness can be eliminated. On the other hand, proper etching procedure with constant stirring of the etchant solution of KOH anisotropic etching significantly reduces the notching effect contributed by the macroscopic roughness. Upon the completion of microcantilever release, suspended microcantilever of 2µm thick is realized with the removal of SiO2 layer using Buffered Oxide Etching (BOE). |
| first_indexed | 2024-03-05T23:30:34Z |
| format | Article |
| id | oai:generic.eprints.org:38849 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-05T23:30:34Z |
| publishDate | 2014 |
| publisher | Trans Tech Publications Ltd., Switzerland |
| record_format | dspace |
| spelling | oai:generic.eprints.org:388492018-06-25T00:43:24Z http://irep.iium.edu.my/38849/ Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching Ab Rahim, Rosminazuin Bais, Badariah Yeop Majlis, Burhanuddin T Technology (General) In this paper, a simple microcantilever release process using anisotropic wet etching is presented. The microcantilever release is conducted at the final stage of the fabrication of piezoresistive microcantilever sensor. Issues related to microcantilever release such as microscopic roughness and macroscopic roughness has been resolved using simple technique. By utilizing silicon oxide (SiO2) as the etch stop for the wet etching process, issues related to microscopic roughness can be eliminated. On the other hand, proper etching procedure with constant stirring of the etchant solution of KOH anisotropic etching significantly reduces the notching effect contributed by the macroscopic roughness. Upon the completion of microcantilever release, suspended microcantilever of 2µm thick is realized with the removal of SiO2 layer using Buffered Oxide Etching (BOE). Trans Tech Publications Ltd., Switzerland 2014 Article PeerReviewed application/pdf en http://irep.iium.edu.my/38849/1/applied_mechanics_and_materials.pdf Ab Rahim, Rosminazuin and Bais, Badariah and Yeop Majlis, Burhanuddin (2014) Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching. Applied Mechanics and Materials, 60. pp. 894-898. ISSN 1660-9336 http://www.scientific.net 10.4028/www.scientific.net/AMM.660.894 |
| spellingShingle | T Technology (General) Ab Rahim, Rosminazuin Bais, Badariah Yeop Majlis, Burhanuddin Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| title | Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| title_full | Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| title_fullStr | Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| title_full_unstemmed | Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| title_short | Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| title_sort | simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching |
| topic | T Technology (General) |
| url | http://irep.iium.edu.my/38849/1/applied_mechanics_and_materials.pdf |
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