Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure
An analysis of the electromechanical coupling coefficient for surface acoustic wave (SAW) devices developed in complementary metal oxide semiconductor (CMOS) is presented in this work. This SAW resonator uses zinc oxide (ZnO) as its piezoelectric thin film. The resonator's interdigitated electr...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
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IEEE
2014
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| Online Access: | http://irep.iium.edu.my/49589/1/49589.pdf |
| _version_ | 1825649546792796160 |
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| author | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin |
| author_facet | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin |
| author_sort | Md Ralib @ Md Raghib, Aliza 'Aini |
| collection | IIUM |
| description | An analysis of the electromechanical coupling coefficient for surface acoustic wave (SAW) devices developed in complementary metal oxide semiconductor (CMOS) is presented in this work. This SAW resonator uses zinc oxide (ZnO) as its piezoelectric thin film. The resonator's interdigitated electrodes were designed such that it produces 1 GHz resonance frequency. Finite element simulation of the CMOS SAW resonator was conducted using COMSOL Mutliphysics™. Three different analyses namely eigenfrequency, frequency domain and time domain analyses were conducted. The thicknesses of ZnO were varied from 2 μm to 5.5 μm with step size of 0.5 μm. Simulation results indicate maximum electromechanical coupling coefficient is achieved when normalized thickness is in the range of 0.63 <; (hzno/λ) <; 0.78. Experimental measurements were conducted on the fabricated CMOS SAW resonator and compared with the simulation results. |
| first_indexed | 2024-03-05T23:49:09Z |
| format | Proceeding Paper |
| id | oai:generic.eprints.org:49589 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-05T23:49:09Z |
| publishDate | 2014 |
| publisher | IEEE |
| record_format | dspace |
| spelling | oai:generic.eprints.org:495892018-06-19T04:30:17Z http://irep.iium.edu.my/49589/ Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices An analysis of the electromechanical coupling coefficient for surface acoustic wave (SAW) devices developed in complementary metal oxide semiconductor (CMOS) is presented in this work. This SAW resonator uses zinc oxide (ZnO) as its piezoelectric thin film. The resonator's interdigitated electrodes were designed such that it produces 1 GHz resonance frequency. Finite element simulation of the CMOS SAW resonator was conducted using COMSOL Mutliphysics™. Three different analyses namely eigenfrequency, frequency domain and time domain analyses were conducted. The thicknesses of ZnO were varied from 2 μm to 5.5 μm with step size of 0.5 μm. Simulation results indicate maximum electromechanical coupling coefficient is achieved when normalized thickness is in the range of 0.63 <; (hzno/λ) <; 0.78. Experimental measurements were conducted on the fabricated CMOS SAW resonator and compared with the simulation results. IEEE 2014-04-01 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/49589/1/49589.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin (2014) Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure. In: 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 1st-4th Apr. 2014, Cannes, French. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7056641&tag=1 10.1109/DTIP.2014.7056641 |
| spellingShingle | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure |
| title | Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure |
| title_full | Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure |
| title_fullStr | Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure |
| title_full_unstemmed | Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure |
| title_short | Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure |
| title_sort | analysis of electromechanical coupling coefficient of surface acoustic wave resonator in zno piezoelectric thin film structure |
| topic | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/49589/1/49589.pdf |
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