Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure
An analysis of the electromechanical coupling coefficient for surface acoustic wave (SAW) devices developed in complementary metal oxide semiconductor (CMOS) is presented in this work. This SAW resonator uses zinc oxide (ZnO) as its piezoelectric thin film. The resonator's interdigitated electr...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
IEEE
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49589/1/49589.pdf |