Laser plasma soft X-Ray sources application in microlithography
| Main Authors: | , |
|---|---|
| Format: | Thesis |
| Published: |
[Amsterdam] : Vrije Universiteit
1993
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| Subjects: |
| _version_ | 1826036174491222016 |
|---|---|
| author | , BIJKERK, Fred , Prof.dr. M.J. van der Wiel |
| author_facet | , BIJKERK, Fred , Prof.dr. M.J. van der Wiel |
| author_sort | , BIJKERK, Fred |
| collection | UGM |
| first_indexed | 2024-03-05T23:53:53Z |
| format | Thesis |
| id | oai:generic.eprints.org:51980 |
| institution | Universiti Gadjah Mada |
| last_indexed | 2024-03-05T23:53:53Z |
| publishDate | 1993 |
| publisher | [Amsterdam] : Vrije Universiteit |
| record_format | dspace |
| spelling | oai:generic.eprints.org:519802014-08-20T06:09:34Z https://repository.ugm.ac.id/51980/ Laser plasma soft X-Ray sources application in microlithography , BIJKERK, Fred , Prof.dr. M.J. van der Wiel ETD [Amsterdam] : Vrije Universiteit 1993 Thesis NonPeerReviewed , BIJKERK, Fred and , Prof.dr. M.J. van der Wiel (1993) Laser plasma soft X-Ray sources application in microlithography. UNSPECIFIED thesis, UNSPECIFIED. http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=12845 |
| spellingShingle | ETD , BIJKERK, Fred , Prof.dr. M.J. van der Wiel Laser plasma soft X-Ray sources application in microlithography |
| title | Laser plasma soft X-Ray sources application in microlithography |
| title_full | Laser plasma soft X-Ray sources application in microlithography |
| title_fullStr | Laser plasma soft X-Ray sources application in microlithography |
| title_full_unstemmed | Laser plasma soft X-Ray sources application in microlithography |
| title_short | Laser plasma soft X-Ray sources application in microlithography |
| title_sort | laser plasma soft x ray sources application in microlithography |
| topic | ETD |
| work_keys_str_mv | AT bijkerkfred laserplasmasoftxraysourcesapplicationinmicrolithography AT profdrmjvanderwiel laserplasmasoftxraysourcesapplicationinmicrolithography |