Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films)
| Main Authors: | , |
|---|---|
| Format: | Thesis |
| Published: |
[Yogyakarta] : Universitas Gadjah Mada
1995
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| Subjects: |
| _version_ | 1797023796379516928 |
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| author | , ANAS, Muhammad , Dr. Karyono, SU |
| author_facet | , ANAS, Muhammad , Dr. Karyono, SU |
| author_sort | , ANAS, Muhammad |
| collection | UGM |
| first_indexed | 2024-03-13T20:15:47Z |
| format | Thesis |
| id | oai:generic.eprints.org:56180 |
| institution | Universiti Gadjah Mada |
| last_indexed | 2024-03-13T20:15:47Z |
| publishDate | 1995 |
| publisher | [Yogyakarta] : Universitas Gadjah Mada |
| record_format | dspace |
| spelling | oai:generic.eprints.org:561802014-08-20T06:07:12Z https://repository.ugm.ac.id/56180/ Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) , ANAS, Muhammad , Dr. Karyono, SU ETD [Yogyakarta] : Universitas Gadjah Mada 1995 Thesis NonPeerReviewed , ANAS, Muhammad and , Dr. Karyono, SU (1995) Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films). UNSPECIFIED thesis, UNSPECIFIED. http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=17045 |
| spellingShingle | ETD , ANAS, Muhammad , Dr. Karyono, SU Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) |
| title | Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) |
| title_full | Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) |
| title_fullStr | Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) |
| title_full_unstemmed | Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) |
| title_short | Deposisi dan karakterisasi lapisan tipis a-Si:H (Deposition and characterization of a-Si:H thin films) |
| title_sort | deposisi dan karakterisasi lapisan tipis a si h deposition and characterization of a si h thin films |
| topic | ETD |
| work_keys_str_mv | AT anasmuhammad deposisidankarakterisasilapisantipisasihdepositionandcharacterizationofasihthinfilms AT drkaryonosu deposisidankarakterisasilapisantipisasihdepositionandcharacterizationofasihthinfilms |