RF magnetron sputtered YSZ thin film: Fabrication and characterizations
In order to obtain high ionic conductivity of a solid electrolyte at intermediate temperatures, a very thin dense film is crucial due to its reduced ohmic losses. This work describes the fabrication of yttria-stablized zirconia (8YSZ) thin films using radio frequency (RF) magnetron sputtering method...
| मुख्य लेखकों: | , , , |
|---|---|
| स्वरूप: | Proceeding Paper |
| भाषा: | English |
| प्रकाशित: |
2010
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| विषय: | |
| ऑनलाइन पहुंच: | http://irep.iium.edu.my/6720/1/ICFMD2010_Shahrul.pdf |