Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics
Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. In this report, a low temperature operation of an atomic force microscope (AFM) was used to condense ambient humidity to perform a thin frozen wat...
| Główni autorzy: | , , , |
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| Format: | Proceeding Paper |
| Język: | English |
| Wydane: |
2007
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| Hasła przedmiotowe: | |
| Dostęp online: | http://irep.iium.edu.my/9447/1/AGUS_-_Proc_ICEEI-2007.pdf |