Low-temperature growth of polycrystalline si thin film using RF magnetron sputtering / Shaiful Bakhtiar Hashim
A study on the growth of polycrystalline Silicon (poly-Si) on a glass Substrate at low temperature is being studied. The preparation was done by using direct deposition of Radiofrequency (RF) magnetron sputtering method. The physical and crystallinity of thin films was studied and investigated to fo...
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2014
|
| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/11932/1/TM_SHAIFUL%20BAKHTIAR%20HASHIM%20EE%2014_5%201.pdf |