Characterization of fluorine upon implant sequence on p-metal oxide semiconductor (PMOS) and P+/N-Junction schottky diode in BiCMOS technology / Siti Zubaidah Md Saad
Fluorine (F) is known as a reactive species that capable to form a variety of complex defects. It beneficial effect as well as the detrimental effect to the electrical and physical characterization of devices have been studied by many researchers. The effect of F to the electrical results such as re...
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| Format: | Thesis |
| Language: | English |
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2014
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| Online Access: | https://ir.uitm.edu.my/id/eprint/12039/1/TM_SITI%20ZUBAIDAH%20MD%20SAAD%20EE%2014_5%201.pdf |