Fabrication and varification of porous silicon nanostructures/ zinc oxide nanostructures as a capacitive chemical sensors by electrochemical impedance method / Mohd Husairi Fadzilah Suhaimi
In this study, preparation and optimization of ZnO nanostructures on PSiNs for chemical sensor was studied. The PSiNs was prepared by electrochemical etching using p-type, [100] orientation silicon wafer as a based material. The PSiNs samples were prepared by the electrochemical etching with photoas...
Main Author: | Fadzilah Suhaimi, Mohd Husairi |
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Format: | Book Section |
Language: | English |
Published: |
Institute of Graduate Studies, UiTM
2015
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Subjects: | |
Online Access: | https://ir.uitm.edu.my/id/eprint/19503/6/19503.pdf |
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