Confocal operation of a transmission electron microscope with two aberration correctors
The authors demonstrate that confocal imaging trajectories can be established in a transmission electron microscope fitted with two spherical aberration correctors. An atomic-scale electron beam, focused by aberration-corrected illumination optics, is directly imaged by a second aberration-corrected...
| Main Authors: | , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
2006
|
| _version_ | 1797050313715220480 |
|---|---|
| author | Nellist, P Behan, G Kirkland, A Hetherington, C |
| author_facet | Nellist, P Behan, G Kirkland, A Hetherington, C |
| author_sort | Nellist, P |
| collection | OXFORD |
| description | The authors demonstrate that confocal imaging trajectories can be established in a transmission electron microscope fitted with two spherical aberration correctors. An atomic-scale electron beam, focused by aberration-corrected illumination optics, is directly imaged by a second aberration-corrected system. The initial experiment described indicates how aberration-corrected scanning confocal electron microscopy will allow three-dimensional imaging and analysis of materials with atomic lateral resolution and with a depth resolution of a few nanometers. The depth resolution in the confocal mode is shown to be robust to the uncorrected chromatic aberration of the lenses, unlike depth sectioning using a single lens. © 2006 American Institute of Physics. |
| first_indexed | 2024-03-06T18:03:20Z |
| format | Journal article |
| id | oxford-uuid:0090aab8-40b4-4903-8111-ad22922db3e5 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T18:03:20Z |
| publishDate | 2006 |
| record_format | dspace |
| spelling | oxford-uuid:0090aab8-40b4-4903-8111-ad22922db3e52022-03-26T08:30:11ZConfocal operation of a transmission electron microscope with two aberration correctorsJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:0090aab8-40b4-4903-8111-ad22922db3e5EnglishSymplectic Elements at Oxford2006Nellist, PBehan, GKirkland, AHetherington, CThe authors demonstrate that confocal imaging trajectories can be established in a transmission electron microscope fitted with two spherical aberration correctors. An atomic-scale electron beam, focused by aberration-corrected illumination optics, is directly imaged by a second aberration-corrected system. The initial experiment described indicates how aberration-corrected scanning confocal electron microscopy will allow three-dimensional imaging and analysis of materials with atomic lateral resolution and with a depth resolution of a few nanometers. The depth resolution in the confocal mode is shown to be robust to the uncorrected chromatic aberration of the lenses, unlike depth sectioning using a single lens. © 2006 American Institute of Physics. |
| spellingShingle | Nellist, P Behan, G Kirkland, A Hetherington, C Confocal operation of a transmission electron microscope with two aberration correctors |
| title | Confocal operation of a transmission electron microscope with two aberration correctors |
| title_full | Confocal operation of a transmission electron microscope with two aberration correctors |
| title_fullStr | Confocal operation of a transmission electron microscope with two aberration correctors |
| title_full_unstemmed | Confocal operation of a transmission electron microscope with two aberration correctors |
| title_short | Confocal operation of a transmission electron microscope with two aberration correctors |
| title_sort | confocal operation of a transmission electron microscope with two aberration correctors |
| work_keys_str_mv | AT nellistp confocaloperationofatransmissionelectronmicroscopewithtwoaberrationcorrectors AT behang confocaloperationofatransmissionelectronmicroscopewithtwoaberrationcorrectors AT kirklanda confocaloperationofatransmissionelectronmicroscopewithtwoaberrationcorrectors AT hetheringtonc confocaloperationofatransmissionelectronmicroscopewithtwoaberrationcorrectors |