Devices of quantum photonics fabricated using Nanoimprint Lithography
Planar-concave microcavities provide longitudinal and transverse optical confinement but are challenging to fabricate. This work reports a new method to fabricate a more scalable monolithic planar-hemispherical cavity using polymers and the deposition of metal mirrors. The FIB-milled stamp with hemi...
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Thesis |
| 语言: | English |
| 出版: |
2023
|