Devices of quantum photonics fabricated using Nanoimprint Lithography

Planar-concave microcavities provide longitudinal and transverse optical confinement but are challenging to fabricate. This work reports a new method to fabricate a more scalable monolithic planar-hemispherical cavity using polymers and the deposition of metal mirrors. The FIB-milled stamp with hemi...

Ausführliche Beschreibung

Bibliographische Detailangaben
1. Verfasser: Li, Y
Weitere Verfasser: Smith, J
Format: Abschlussarbeit
Sprache:English
Veröffentlicht: 2023