Devices of quantum photonics fabricated using Nanoimprint Lithography
Planar-concave microcavities provide longitudinal and transverse optical confinement but are challenging to fabricate. This work reports a new method to fabricate a more scalable monolithic planar-hemispherical cavity using polymers and the deposition of metal mirrors. The FIB-milled stamp with hemi...
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| Формат: | Диссертация |
| Язык: | English |
| Опубликовано: |
2023
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