Devices of quantum photonics fabricated using Nanoimprint Lithography

Planar-concave microcavities provide longitudinal and transverse optical confinement but are challenging to fabricate. This work reports a new method to fabricate a more scalable monolithic planar-hemispherical cavity using polymers and the deposition of metal mirrors. The FIB-milled stamp with hemi...

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Bibliografiska uppgifter
Huvudupphovsman: Li, Y
Övriga upphovsmän: Smith, J
Materialtyp: Lärdomsprov
Språk:English
Publicerad: 2023