Devices of quantum photonics fabricated using Nanoimprint Lithography
Planar-concave microcavities provide longitudinal and transverse optical confinement but are challenging to fabricate. This work reports a new method to fabricate a more scalable monolithic planar-hemispherical cavity using polymers and the deposition of metal mirrors. The FIB-milled stamp with hemi...
Huvudupphovsman: | |
---|---|
Övriga upphovsmän: | |
Materialtyp: | Lärdomsprov |
Språk: | English |
Publicerad: |
2023
|