Devices of quantum photonics fabricated using Nanoimprint Lithography
Planar-concave microcavities provide longitudinal and transverse optical confinement but are challenging to fabricate. This work reports a new method to fabricate a more scalable monolithic planar-hemispherical cavity using polymers and the deposition of metal mirrors. The FIB-milled stamp with hemi...
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| 格式: | Thesis |
| 語言: | English |
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2023
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