Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas
| Autores principales: | , , , |
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| Formato: | Journal article |
| Publicado: |
1997
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| _version_ | 1826257393340645376 |
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| author | Woodcock, B Busby, JR Freegarde, T Hancock, G |
| author_facet | Woodcock, B Busby, JR Freegarde, T Hancock, G |
| author_sort | Woodcock, B |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-06T18:17:30Z |
| format | Journal article |
| id | oxford-uuid:051dcbb2-54be-4a09-8ddd-1c21c7598220 |
| institution | University of Oxford |
| last_indexed | 2024-03-06T18:17:30Z |
| publishDate | 1997 |
| record_format | dspace |
| spelling | oxford-uuid:051dcbb2-54be-4a09-8ddd-1c21c75982202022-03-26T08:55:22ZDoppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmasJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:051dcbb2-54be-4a09-8ddd-1c21c7598220Symplectic Elements at Oxford1997Woodcock, BBusby, JRFreegarde, THancock, G |
| spellingShingle | Woodcock, B Busby, JR Freegarde, T Hancock, G Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas |
| title | Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas |
| title_full | Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas |
| title_fullStr | Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas |
| title_full_unstemmed | Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas |
| title_short | Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas |
| title_sort | doppler spectroscopic measurements of sheath ion velocities in radio frequency plasmas |
| work_keys_str_mv | AT woodcockb dopplerspectroscopicmeasurementsofsheathionvelocitiesinradiofrequencyplasmas AT busbyjr dopplerspectroscopicmeasurementsofsheathionvelocitiesinradiofrequencyplasmas AT freegardet dopplerspectroscopicmeasurementsofsheathionvelocitiesinradiofrequencyplasmas AT hancockg dopplerspectroscopicmeasurementsofsheathionvelocitiesinradiofrequencyplasmas |