THERMAL AND PHOTOCHEMICAL VAPOR-DEPOSITION OF FE FROM FE(CO)5 ON SI(100)
The adsorption of Fe(CO)5 on Si(100) has been studied using AES and TDS techniques; pyrolytic and photochemical decomposition reactions have been examined. The adsorbate is found to undergo a dissociative, activated adsorption reaction above 300 K resulting in formation of an Fe film in which the ca...
| Main Authors: | , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1989
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