Spatial resolution in atom probe tomography.
This article addresses gaps in definitions and a lack of standard measurement techniques to assess the spatial resolution in atom probe tomography. This resolution is known to be anisotropic, being better in-depth than laterally. Generally the presence of atomic planes in the tomographic reconstruct...
| Auteurs principaux: | , , , , , , |
|---|---|
| Format: | Journal article |
| Langue: | English |
| Publié: |
2010
|