Toward electron exit wave tomography of amorphous materials at atomic resolution

We suggest to use electron exit wave phase for tomographic reconstruction of structure of Au-doped amorphous Si with atomic resolution. In the present theoretical investigation into the approach it is found that the number of projections and the accuracy of defocus in the focal series restoration ar...

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Main Authors: Borisenko, K, Moldovan, G, Kirkland, A, Van Dyck, D, Tang, H, Chen, F
Format: Journal article
Language:English
Published: 2012
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author Borisenko, K
Moldovan, G
Kirkland, A
Van Dyck, D
Tang, H
Chen, F
author_facet Borisenko, K
Moldovan, G
Kirkland, A
Van Dyck, D
Tang, H
Chen, F
author_sort Borisenko, K
collection OXFORD
description We suggest to use electron exit wave phase for tomographic reconstruction of structure of Au-doped amorphous Si with atomic resolution. In the present theoretical investigation into the approach it is found that the number of projections and the accuracy of defocus in the focal series restoration are the main factors that contribute to the final resolution. Although resolution is ultimately limited by these factors, phase shifts in the exit wave are sufficient to identify the position of Au atoms in an amorphous Si needle model, even when only 19 projections with defocus error of 4 nm are used. Electron beam damage will probably further limit the resolution of such tomographic reconstructions, however beam damage can be mitigated using lower accelerating voltages. © 2011 Elsevier B.V. All rights reserved.
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spelling oxford-uuid:0b9a62d2-ff83-419d-9da3-58e10ce04e772022-03-26T09:30:19ZToward electron exit wave tomography of amorphous materials at atomic resolutionJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:0b9a62d2-ff83-419d-9da3-58e10ce04e77EnglishSymplectic Elements at Oxford2012Borisenko, KMoldovan, GKirkland, AVan Dyck, DTang, HChen, FWe suggest to use electron exit wave phase for tomographic reconstruction of structure of Au-doped amorphous Si with atomic resolution. In the present theoretical investigation into the approach it is found that the number of projections and the accuracy of defocus in the focal series restoration are the main factors that contribute to the final resolution. Although resolution is ultimately limited by these factors, phase shifts in the exit wave are sufficient to identify the position of Au atoms in an amorphous Si needle model, even when only 19 projections with defocus error of 4 nm are used. Electron beam damage will probably further limit the resolution of such tomographic reconstructions, however beam damage can be mitigated using lower accelerating voltages. © 2011 Elsevier B.V. All rights reserved.
spellingShingle Borisenko, K
Moldovan, G
Kirkland, A
Van Dyck, D
Tang, H
Chen, F
Toward electron exit wave tomography of amorphous materials at atomic resolution
title Toward electron exit wave tomography of amorphous materials at atomic resolution
title_full Toward electron exit wave tomography of amorphous materials at atomic resolution
title_fullStr Toward electron exit wave tomography of amorphous materials at atomic resolution
title_full_unstemmed Toward electron exit wave tomography of amorphous materials at atomic resolution
title_short Toward electron exit wave tomography of amorphous materials at atomic resolution
title_sort toward electron exit wave tomography of amorphous materials at atomic resolution
work_keys_str_mv AT borisenkok towardelectronexitwavetomographyofamorphousmaterialsatatomicresolution
AT moldovang towardelectronexitwavetomographyofamorphousmaterialsatatomicresolution
AT kirklanda towardelectronexitwavetomographyofamorphousmaterialsatatomicresolution
AT vandyckd towardelectronexitwavetomographyofamorphousmaterialsatatomicresolution
AT tangh towardelectronexitwavetomographyofamorphousmaterialsatatomicresolution
AT chenf towardelectronexitwavetomographyofamorphousmaterialsatatomicresolution