Deposition of SrZrO3 thin films using liquid delivery metal-organic chemical vapor deposition
Proton-conductive SrZrO3 films were successfully deposited on Pt/SiOx/Si and porous stainless-steel substrates by liquid delivery metalorganic chemical vapor deposition (LD-MOCVD). The as-deposited films deposited on the Pt/SiOx/Si substrate at 600 °C showed good crystallinity and post-annealing at...
Full description
Bibliographic Details
| Main Authors: |
Uchiyama, K,
Sakairi, H,
Shiosaki, T,
Kariya, T,
Ikeda, H,
Yanagimoto, K,
Yamada, Y,
Nakayama, A |
|---|
| Format: | Journal article
|
|---|
| Language: | English |
|---|
| Published: |
2009
|
|---|