Deposition of SrZrO3 thin films using liquid delivery metal-organic chemical vapor deposition
Proton-conductive SrZrO3 films were successfully deposited on Pt/SiOx/Si and porous stainless-steel substrates by liquid delivery metalorganic chemical vapor deposition (LD-MOCVD). The as-deposited films deposited on the Pt/SiOx/Si substrate at 600 °C showed good crystallinity and post-annealing at...
المؤلفون الرئيسيون: | Uchiyama, K, Sakairi, H, Shiosaki, T, Kariya, T, Ikeda, H, Yanagimoto, K, Yamada, Y, Nakayama, A |
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التنسيق: | Journal article |
اللغة: | English |
منشور في: |
2009
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مواد مشابهة
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