Deposition of SrZrO3 thin films using liquid delivery metal-organic chemical vapor deposition

Deposition of SrZrO3 thin films using liquid delivery metal-organic chemical vapor deposition

Proton-conductive SrZrO3 films were successfully deposited on Pt/SiOx/Si and porous stainless-steel substrates by liquid delivery metalorganic chemical vapor deposition (LD-MOCVD). The as-deposited films deposited on the Pt/SiOx/Si substrate at 600 °C showed good crystallinity and post-annealing at...

Podrobná bibliografie
Hlavní autoři:	Uchiyama, K, Sakairi, H, Shiosaki, T, Kariya, T, Ikeda, H, Yanagimoto, K, Yamada, Y, Nakayama, A
Médium:	Journal article
Jazyk:	English
Vydáno:	2009

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