Cryogenic two-photon laser photolithography with SU-8
Main Authors: | , , , , , , , |
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Formato: | Journal article |
Publicado em: |
2006
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_version_ | 1826260518131728384 |
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author | Lee, K Green, A Taylor, R Sharp, D Turberfield, A Brossard, F Williams, D Briggs, G |
author_facet | Lee, K Green, A Taylor, R Sharp, D Turberfield, A Brossard, F Williams, D Briggs, G |
author_sort | Lee, K |
collection | OXFORD |
description | |
first_indexed | 2024-03-06T19:06:54Z |
format | Journal article |
id | oxford-uuid:157351e5-1871-4f81-a934-977ab3f33fb1 |
institution | University of Oxford |
last_indexed | 2024-03-06T19:06:54Z |
publishDate | 2006 |
record_format | dspace |
spelling | oxford-uuid:157351e5-1871-4f81-a934-977ab3f33fb12022-03-26T10:25:35ZCryogenic two-photon laser photolithography with SU-8Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:157351e5-1871-4f81-a934-977ab3f33fb1Symplectic Elements at Oxford2006Lee, KGreen, ATaylor, RSharp, DTurberfield, ABrossard, FWilliams, DBriggs, G |
spellingShingle | Lee, K Green, A Taylor, R Sharp, D Turberfield, A Brossard, F Williams, D Briggs, G Cryogenic two-photon laser photolithography with SU-8 |
title | Cryogenic two-photon laser photolithography with SU-8 |
title_full | Cryogenic two-photon laser photolithography with SU-8 |
title_fullStr | Cryogenic two-photon laser photolithography with SU-8 |
title_full_unstemmed | Cryogenic two-photon laser photolithography with SU-8 |
title_short | Cryogenic two-photon laser photolithography with SU-8 |
title_sort | cryogenic two photon laser photolithography with su 8 |
work_keys_str_mv | AT leek cryogenictwophotonlaserphotolithographywithsu8 AT greena cryogenictwophotonlaserphotolithographywithsu8 AT taylorr cryogenictwophotonlaserphotolithographywithsu8 AT sharpd cryogenictwophotonlaserphotolithographywithsu8 AT turberfielda cryogenictwophotonlaserphotolithographywithsu8 AT brossardf cryogenictwophotonlaserphotolithographywithsu8 AT williamsd cryogenictwophotonlaserphotolithographywithsu8 AT briggsg cryogenictwophotonlaserphotolithographywithsu8 |