CLASSICAL TRAJECTORY CALCULATIONS OF NONLINEAR SPUTTERING - SICL4 SPUTTERING OF A CU(001) SURFACE USING ABINITIO POTENTIALS
Classical trajectory calculations are carried out on SiCl4 sputtering of a Cu(001) surface. The repulsive Cu{single bond}Si and Cu{single bond}Cl interaction potentials are calculated using ab initio electronic structure theory. At energies of 120 eV or greater, the calculated sputtering yields are...
| Main Authors: | , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
1990
|