CLASSICAL TRAJECTORY CALCULATIONS OF NONLINEAR SPUTTERING - SICL4 SPUTTERING OF A CU(001) SURFACE USING ABINITIO POTENTIALS
Classical trajectory calculations are carried out on SiCl4 sputtering of a Cu(001) surface. The repulsive Cu{single bond}Si and Cu{single bond}Cl interaction potentials are calculated using ab initio electronic structure theory. At energies of 120 eV or greater, the calculated sputtering yields are...
| Autori principali: | , , |
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| Natura: | Journal article |
| Lingua: | English |
| Pubblicazione: |
1990
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