Extracting band-tail interface state densities from measurements and modelling of space charge layer resistance
Dielectric-silicon interfaces are becoming ever more important to device performance. Charge inside a surface dielectric layer is neutralized in Si leading to an accumulation or inversion layer of free carriers. Additionally, states at the interface are occupied by charges via Shockley-Read-Hall car...
| Main Authors: | , , , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
Elsevier
2021
|