Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors

We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthreshold swings comparable to conventional metal/o...

תיאור מלא

מידע ביבליוגרפי
Main Authors:	Carrad, D, Burke, A, Lyttleton, R, Joyce, H, Tan, H, Jagadish, C, Storm, K, Linke, H, Samuelson, L, Micolich, A
פורמט:	Journal article
שפה:	English
יצא לאור:	2014

Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors

פריטים דומים