Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study

A negative bias applied to a nondiamond substrate at the initiation of microwave plasma-enhanced chemical-vapor deposition of thin-film diamond can lead to diamond nucleation, high crystalline density, and an improved level of crystallographic alignment. In this work, optical emission spectroscopy h...

Descripció completa

Dades bibliogràfiques
Autors principals: Whitfield, MD, Jackman, R, Rodway, D, Savage, J, Foord, J
Format: Journal article
Idioma:English
Publicat: 1996
_version_ 1826265361644781568
author Whitfield, MD
Jackman, R
Rodway, D
Savage, J
Foord, J
author_facet Whitfield, MD
Jackman, R
Rodway, D
Savage, J
Foord, J
author_sort Whitfield, MD
collection OXFORD
description A negative bias applied to a nondiamond substrate at the initiation of microwave plasma-enhanced chemical-vapor deposition of thin-film diamond can lead to diamond nucleation, high crystalline density, and an improved level of crystallographic alignment. In this work, optical emission spectroscopy has been used to study changes in the chemical species within the plasma that occur as a result the applied bias to a tungsten substrate. The ratio of C2 to CH species detected changes considerably as does the atomic hydrogen intensity as the bias is applied. Both effects appear to be greatest near the substrate surface. The results are discussed in terms of possible origins for the bias-enhanced nucleation process. © 1996 American Institute of Physics.
first_indexed 2024-03-06T20:22:30Z
format Journal article
id oxford-uuid:2e4ea36c-727a-4817-9bb9-0176ac0d843f
institution University of Oxford
language English
last_indexed 2024-03-06T20:22:30Z
publishDate 1996
record_format dspace
spelling oxford-uuid:2e4ea36c-727a-4817-9bb9-0176ac0d843f2022-03-26T12:48:10ZMicrowave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic studyJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:2e4ea36c-727a-4817-9bb9-0176ac0d843fEnglishSymplectic Elements at Oxford1996Whitfield, MDJackman, RRodway, DSavage, JFoord, JA negative bias applied to a nondiamond substrate at the initiation of microwave plasma-enhanced chemical-vapor deposition of thin-film diamond can lead to diamond nucleation, high crystalline density, and an improved level of crystallographic alignment. In this work, optical emission spectroscopy has been used to study changes in the chemical species within the plasma that occur as a result the applied bias to a tungsten substrate. The ratio of C2 to CH species detected changes considerably as does the atomic hydrogen intensity as the bias is applied. Both effects appear to be greatest near the substrate surface. The results are discussed in terms of possible origins for the bias-enhanced nucleation process. © 1996 American Institute of Physics.
spellingShingle Whitfield, MD
Jackman, R
Rodway, D
Savage, J
Foord, J
Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
title Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
title_full Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
title_fullStr Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
title_full_unstemmed Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
title_short Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
title_sort microwave plasma characteristics during bias enhanced nucleation of diamond an optical emission spectroscopic study
work_keys_str_mv AT whitfieldmd microwaveplasmacharacteristicsduringbiasenhancednucleationofdiamondanopticalemissionspectroscopicstudy
AT jackmanr microwaveplasmacharacteristicsduringbiasenhancednucleationofdiamondanopticalemissionspectroscopicstudy
AT rodwayd microwaveplasmacharacteristicsduringbiasenhancednucleationofdiamondanopticalemissionspectroscopicstudy
AT savagej microwaveplasmacharacteristicsduringbiasenhancednucleationofdiamondanopticalemissionspectroscopicstudy
AT foordj microwaveplasmacharacteristicsduringbiasenhancednucleationofdiamondanopticalemissionspectroscopicstudy