Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study

Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study

A negative bias applied to a nondiamond substrate at the initiation of microwave plasma-enhanced chemical-vapor deposition of thin-film diamond can lead to diamond nucleation, high crystalline density, and an improved level of crystallographic alignment. In this work, optical emission spectroscopy h...

Bibliografiset tiedot
Päätekijät:	Whitfield, MD, Jackman, R, Rodway, D, Savage, J, Foord, J
Aineistotyyppi:	Journal article
Kieli:	English
Julkaistu:	1996

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