NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE
The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that e...
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Bibliographic Details
Main Authors: |
Ashworth, C,
Messoloras, S,
Stewart, R,
Wilkes, J,
Baldwin, I,
Penfold, J |
Format: | Journal article
|
Language: | English |
Published: |
1989
|