NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE
The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that e...
| Main Authors: | , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1989
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| _version_ | 1797061048777310208 |
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| author | Ashworth, C Messoloras, S Stewart, R Wilkes, J Baldwin, I Penfold, J |
| author_facet | Ashworth, C Messoloras, S Stewart, R Wilkes, J Baldwin, I Penfold, J |
| author_sort | Ashworth, C |
| collection | OXFORD |
| description | The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that experimentally determined. The layer thickness and the corresponding interface structures are detailed. Two modelling techniques have been used, one based on the Born and Wolf matrices and the other based on the Abeles method. The two techniques are compared and the sensitivity of the two techniques are discussed. |
| first_indexed | 2024-03-06T20:25:32Z |
| format | Journal article |
| id | oxford-uuid:2f43c151-1ad6-4a9c-9848-0b62249d9b50 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T20:25:32Z |
| publishDate | 1989 |
| record_format | dspace |
| spelling | oxford-uuid:2f43c151-1ad6-4a9c-9848-0b62249d9b502022-03-26T12:54:17ZNEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATEJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:2f43c151-1ad6-4a9c-9848-0b62249d9b50EnglishSymplectic Elements at Oxford1989Ashworth, CMessoloras, SStewart, RWilkes, JBaldwin, IPenfold, JThe neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that experimentally determined. The layer thickness and the corresponding interface structures are detailed. Two modelling techniques have been used, one based on the Born and Wolf matrices and the other based on the Abeles method. The two techniques are compared and the sensitivity of the two techniques are discussed. |
| spellingShingle | Ashworth, C Messoloras, S Stewart, R Wilkes, J Baldwin, I Penfold, J NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE |
| title | NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE |
| title_full | NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE |
| title_fullStr | NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE |
| title_full_unstemmed | NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE |
| title_short | NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE |
| title_sort | neutron reflectivity from a silicon nitride layer on a silicon substrate |
| work_keys_str_mv | AT ashworthc neutronreflectivityfromasiliconnitridelayeronasiliconsubstrate AT messolorass neutronreflectivityfromasiliconnitridelayeronasiliconsubstrate AT stewartr neutronreflectivityfromasiliconnitridelayeronasiliconsubstrate AT wilkesj neutronreflectivityfromasiliconnitridelayeronasiliconsubstrate AT baldwini neutronreflectivityfromasiliconnitridelayeronasiliconsubstrate AT penfoldj neutronreflectivityfromasiliconnitridelayeronasiliconsubstrate |