NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE
The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that e...
| Main Authors: | , , , , , |
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| פורמט: | Journal article |
| שפה: | English |
| יצא לאור: |
1989
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