NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE
The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that e...
Үндсэн зохиолчид: | , , , , , |
---|---|
Формат: | Journal article |
Хэл сонгох: | English |
Хэвлэсэн: |
1989
|