NEUTRON REFLECTIVITY FROM A SILICON-NITRIDE LAYER ON A SILICON SUBSTRATE

The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity matches that e...

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Những tác giả chính: Ashworth, C, Messoloras, S, Stewart, R, Wilkes, J, Baldwin, I, Penfold, J
Định dạng: Journal article
Ngôn ngữ:English
Được phát hành: 1989