An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam

A method for the rapid preparation of atom probe tomography (APT) needles using a xenon plasma-focussed ion beam (FIB) instrument is presented and demonstrated on a test sample of Ti-6Al-4V alloy. The method requires significantly less operator input than the standard lift-out protocol, is site-spec...

Description complète

Détails bibliographiques
Auteurs principaux: Halpin, J, Webster, R, Gardner, H, Moody, M, Bagot, P, MacLaren, D
Format: Journal article
Publié: Elsevier 2019
_version_ 1826265856966918144
author Halpin, J
Webster, R
Gardner, H
Moody, M
Bagot, P
MacLaren, D
author_facet Halpin, J
Webster, R
Gardner, H
Moody, M
Bagot, P
MacLaren, D
author_sort Halpin, J
collection OXFORD
description A method for the rapid preparation of atom probe tomography (APT) needles using a xenon plasma-focussed ion beam (FIB) instrument is presented and demonstrated on a test sample of Ti-6Al-4V alloy. The method requires significantly less operator input than the standard lift-out protocol, is site-specific and produces needles with minimal ion-beam damage; electron microscopy indicated the needle's surface amorphised/oxidised region to be less than 2 nm thick. The resulting needles were routinely analysable by APT, confirming the expected microstructure and showing negligible Xe contamination.
first_indexed 2024-03-06T20:30:11Z
format Journal article
id oxford-uuid:30c652a1-9eb7-4ca1-9a6b-10b2716dec3d
institution University of Oxford
last_indexed 2024-03-06T20:30:11Z
publishDate 2019
publisher Elsevier
record_format dspace
spelling oxford-uuid:30c652a1-9eb7-4ca1-9a6b-10b2716dec3d2022-03-26T13:03:43ZAn in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beamJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:30c652a1-9eb7-4ca1-9a6b-10b2716dec3dSymplectic Elements at OxfordElsevier2019Halpin, JWebster, RGardner, HMoody, MBagot, PMacLaren, DA method for the rapid preparation of atom probe tomography (APT) needles using a xenon plasma-focussed ion beam (FIB) instrument is presented and demonstrated on a test sample of Ti-6Al-4V alloy. The method requires significantly less operator input than the standard lift-out protocol, is site-specific and produces needles with minimal ion-beam damage; electron microscopy indicated the needle's surface amorphised/oxidised region to be less than 2 nm thick. The resulting needles were routinely analysable by APT, confirming the expected microstructure and showing negligible Xe contamination.
spellingShingle Halpin, J
Webster, R
Gardner, H
Moody, M
Bagot, P
MacLaren, D
An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam
title An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam
title_full An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam
title_fullStr An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam
title_full_unstemmed An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam
title_short An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focused ion beam
title_sort in situ approach for preparing atom probe tomography specimens by xenon plasma focused ion beam
work_keys_str_mv AT halpinj aninsituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT websterr aninsituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT gardnerh aninsituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT moodym aninsituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT bagotp aninsituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT maclarend aninsituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT halpinj insituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT websterr insituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT gardnerh insituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT moodym insituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT bagotp insituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam
AT maclarend insituapproachforpreparingatomprobetomographyspecimensbyxenonplasmafocusedionbeam