GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON
| Main Authors: | , , |
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| Format: | Conference item |
| Published: |
1992
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| _version_ | 1826266105064194048 |
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| author | Decoteau, M Wilshaw, P Falster, R |
| author_facet | Decoteau, M Wilshaw, P Falster, R |
| author_sort | Decoteau, M |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-06T20:33:53Z |
| format | Conference item |
| id | oxford-uuid:31f76f16-c062-40f0-9992-370f5cef9d8c |
| institution | University of Oxford |
| last_indexed | 2024-03-06T20:33:53Z |
| publishDate | 1992 |
| record_format | dspace |
| spelling | oxford-uuid:31f76f16-c062-40f0-9992-370f5cef9d8c2022-03-26T13:11:10ZGETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICONConference itemhttp://purl.org/coar/resource_type/c_5794uuid:31f76f16-c062-40f0-9992-370f5cef9d8cSymplectic Elements at Oxford1992Decoteau, MWilshaw, PFalster, R |
| spellingShingle | Decoteau, M Wilshaw, P Falster, R GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON |
| title | GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON |
| title_full | GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON |
| title_fullStr | GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON |
| title_full_unstemmed | GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON |
| title_short | GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON |
| title_sort | gettering of copper and iron to extended surface defects in silicon |
| work_keys_str_mv | AT decoteaum getteringofcopperandirontoextendedsurfacedefectsinsilicon AT wilshawp getteringofcopperandirontoextendedsurfacedefectsinsilicon AT falsterr getteringofcopperandirontoextendedsurfacedefectsinsilicon |