Phase velocity measurement of in-plane polarized surface acoustic waves with high spatial resolution
In this paper we present a new method that allows the measurement of the phase velocity of in-plane polarized SAWs with high spatial resolution. The capabilities of the scanning acoustic force microscope had to be extended by the analysis of torsional cantilever motion. A nonlinear coupling mechanis...
| Main Authors: | , , , |
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| Format: | Conference item |
| Published: |
IEEE
1998
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| Summary: | In this paper we present a new method that allows the measurement of the phase velocity of in-plane polarized SAWs with high spatial resolution. The capabilities of the scanning acoustic force microscope had to be extended by the analysis of torsional cantilever motion. A nonlinear coupling mechanism between in-plane oscillations and this movement could be found, that allows an mechanical mixing of in-plane SAWs. Phase velocity measurements of Love waves on the system Au/SiO2/ST-quartz are presented. A good agreement with theoretical predictions for the velocities could be found. |
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