Determination of the anisotropy of young's modulus using a coupled microcantilever array
This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a wagon wheel configuration. The long ax...
| Autors principals: | , , , |
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| Format: | Journal article |
| Idioma: | English |
| Publicat: |
2012
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