Ab initio study of the diffusion and decomposition pathways of SiHx species on Si(100)
Diffusion and decomposition of SiHx species adsorbed on the clean Si(100) surface are processes of relevance for the growth of crystalline silicon by plasma-enhanced chemical vapor deposition. In this work, we report an extensive search of diffusion and decomposition pathways for SiH3, SiH2, and SiH...
| Main Authors: | , , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
2009
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